TU3.R3.2

A NOVEL PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) REACTOR SYSTEM FOR FABRICATION OF SIC-TYPE CERAMIC FILMS AND MEMBRANES

Farnaz Tabarkhoon, Mohammad Bazmi, Nicholas A. Welchert, Theo Tsotsis, Malancha Gupta, University of Southern California

Session:
TU3.R3: Reaction Engineering for Materials Synthesis

Track:
Reaction Engineering for Materials Synthesis

Location:
Tanglewood/Bellaire

Presentation Time:
Tue, 18 Feb, 16:10 - 16:30 CT (UTC -5)

Session Co-Chairs:
Jeremy Bedard, Oxy and Nicholas Thornburg, National Renewable Energy Laboratory
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