WE2.R3.2

A NOVEL PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) REACTOR SYSTEM FOR FABRICATION OF SIC-TYPE CERAMIC FILMS AND MEMBRANES

Farnaz Tabarkhoon, Mohammad Bazmi, Nicholas A. Welchert, Theo Tsotsis, Malancha Gupta, University of Southern California, United States

Session:
WE2.R3: Reaction Engineering for Materials Synthesis

Track:
Reaction Engineering for Materials Synthesis

Location:
Room 3

Presentation Time:
Wed, 19 Feb, 11:05 - 11:25 CT (UTC -6)

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